Mary Puma 1 e1634083041726

Mary G. Puma

Axcelis Technologies

Mary Puma has been Axcelis’ CEO since January 2002. She played an instrumental role in the company’s spin off from Eaton Corporation in 2000, when she was named President and COO. Puma joined the semiconductor business in 1998, when it was Eaton’s Semiconductor Operation, first serving as its vice president and then as the vice president for the total operation. Puma joined Eaton in May 1996 as the general manager of the company’s commercial controls division. Earlier in her career, she spent 15 years in various marketing and general management positions at five different General Electric business units. Mary is a board member of Nordson Corporation, North Shore Medical Center and Semiconductor Equipment and Materials International (SEMI). She holds a BA in economics from Tufts University and an MS in Management from the MIT Sloan School of Management.

Year appointed: 2002

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